-
News
-
Subscribe to EP newsletter
New Test & Measurement DealersSelect All
-
- Buy
- Sell
- Industry Directory
- Apps
|
|||
![]() |
|
![]() |
Used Plasmatherm SLR 720 RIE Reactive Ion Etcher Plasma Shuttle- by Direct Source Surplus,LLC
- Item Condition:
- Brand:
- Model#:
- Location:
- Price:
Product Description
Used Plasmatherm SLR 720 RIE Reactive Ion Etcher Plasma Shuttle-Lock
Reactive Ion Etcher Plasma Shuttle-Lock load-lock loading system with platen transfer Model 700 Al Chamber with 11 RIE substrate electrode and upper showerhead electrode,Z80 controller (upgrade to PC software is an option)MKS 286 controller,MKS Ion gauge controller 290,RF generator,MKS 252 exhaust valve controller,Stroke Vane Pump Model 017-24,Leybold 361C turbo,gas distribution center w/(6) MKS mass flows installed- N2,O2,Clorine,Sufur Hexafluoride,Freon 14,Freon 23, Full set of Plasmatherm software, Pumps for process and load lock included, Chiller

About EquipOne
Buying on EquipOne
Marketing on EquipOne
Copyright © 2012 Equip One Company Incorporated. All rights reserved.