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Fusion 150PC UV Stabilizer by SitekProcess
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Product Description
Photostabilization System 150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substrates Cassette to cassette handling Fusion 150 PC Photostabilization System150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substratesSoftware Rev. 4.4Cassette to cassette handling Process combines an intense UV light exposure with a programmable increase of the semiconductor photoresist/substrate temperature Transporters: Robotic pick and place Lamp Functions: Off, Flash, Low, High Chuck Temperature Range: 50-240¡ãC, user selectable Chuck Temperature Ramp Rate: 0.5-2.5¡ãC/sec. range, user defined with max. rate dependent on substrateSimilar Products
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Model#: 150PC
Location:
United States
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Condition : USED
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Location:
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Condition : Seller Refurbished
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Condition : Seller Refurbished
Model#: Ozone Asher 200AC
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Model#: M150PC
Location:
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Model#: M150PC
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Model#: M150PC
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Condition : USED
Model#: KLA - Tencor UV 1080
Location:
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Condition : USED
Model#: Genius 52-5 L UV
Location:
Switzerland
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Condition : Seller Refurbished
Model#: Fusion Alpha-HT
Location:
United States
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Model#: Fusion Alpha-FP
Location:
Canton, Massachusetts, USA
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Condition : USED
Model#: ELx 405 UV
Location:
United States
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Model#: M200PCU
Location:
United States
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Model#: M200PCU
Location:
United States
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Model#: Fusion Alpha A153603
Location:
Canton, Massachusetts, USA
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Condition : NEW
Location:
China