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Strasbaugh Model 6EC Laboratory Planarizer Wafer Polisher/Grinder by Sam PeGan
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Product Description
1997 Strasbaugh Model 6EC Laboratory Planarizer
Features:
* 22" DIAMETER WATER COOLED HARD ANODIZED ALUMINUM TABLE LAPPED FLAT .0005" T.I.R., SS PAN WITH DRAIN
* AUTOMATIC CYCLING WITH 9" MONOCHROME TOUCH SCREEN OPERATOR INTERFACE (ALL MACHINE FUNCTIONS HAVE MANUAL OVER-RIDE)
* AIR POLISHING PRESSURE SYSTEM. INCLUDES DIAPHRAGM CYLINDER WITH SPRING RETURN, ELIMINATING NEED FOR COUNTERBALANCE PRESSURE.
* PROGRAMMABLE DOWN PRESSURE FOR OVER-ARM WITH DIGITAL DISPLAY OF DOWNFORCE
* PROGRAMMABLE PAD CONDITIONER
* VARIABLE SPEED TABLE WITH AC INVERTER AND DIGITAL SPEED INDICATION. ALLOES POLISHING TABLE TO RUN AT APPROXIMATELY 20-185 RPM.
* VARIABLE SPEED POWERED QUILL WITH DIGITAL SPEED INDICATION
* LOAD METER FOR POWERED QUILL
* D.I. WATER SYSTEM WITH FLOW METER
* LOAD/UNLOAD STATION FOR PICKUP AND DROPOFF OF WAFER. INCLUDES SPRAY NOZZLE TO WET BOTTOM OF WAFER.
* SPECIAL BACKPRESSURE/VACUUM SYSTEM
* SPECIAL QUILL SHAFT (A-38-1) AND CHUCK FLANGE ADAPTER (A-38-2) TO USE WITH BACKPRESSURE/VACUUM SYSTEM AND GIMBAL CHUCKS
* AUTOMATIC RISE OF QUILL AT END OF CYCLE BEFORE POLISHING TABLE STOPS. PLUS PANIC TABLE STOP/QUILL RISE WHEN STOP BUTTON IS DEPRESSED.
* SAFETY DISCONNECT SWITCH, 600V
* WORK AREA ENCLOSURE WITH SAFETY INTERLOCKED DOORS AND ACCESS PANELS
* FUME EXHAUST IN SS SPLASH PAN ASSEMBLY
* BOTTOM SEAL PLATE IN MAIN CABINET FRAME.
* LEVELING FEET (SET OF 4)
* CLEAR PLASTIC TABLE COVER WITH HANDLES
ORIGINAL PRICE: $125,000
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