-
News
-
Subscribe to EP newsletter
New Test & Measurement DealersSelect All
-
- Buy
- Sell
- Industry Directory
- Apps
|
|||
 |
 |
||
Lam Research AutoEtch 490 Nitride Poly Etcher by Global Nanotech Equipment
- Item Condition:
- Brand:
- Model#:
- Location:
- Price:
Product Description
Description for reference only(One of the unit).
Wafer Size Capacity:4 to 6 inch
The system includes the following.
Send Indexer
Receive Indexer
Entrance Lifter
Exit Lifter
4 Pin Lifter
Gap Assembly
Lower Match Assembly
Upper Electrode Assembly
Lower Electrode Assembly
5 MFC Gas Box
Main Power Supply
Main Chamber Generator
2 Recipe Modules, 2 Master Modules
Front & Rear EMO Switches
Panels & Plexi Glass Covers (Standalone System)
Main Chamber, Hex Plate, Orifice Ring, Pump Ring
2 Channel Endpoint Detector
Similar Products
|
|
|
Condition : Seller Refurbished
Model#: 490
Location:
|
|
|
Condition : USED
Model#: Lam AutoEtch 490
Location:
United States
|
|
|
Condition : USED
Model#: Lam AutoEtch 790
Location:
United States
|
|
|
Condition : NEW
Location:
United States
|
|
|
Model#: 490
Location:
United States
|
|
|
|
Model#: 490
Location:
United States
|
|
|
Condition : Seller Refurbished
Model#: Lam 4720 8¿ Tungsten Etcher
Location:
|
|
|
Condition : NEW
Location:
United States
|
|
|
Condition : NEW
Location:
United States
|
|
|
|
Condition : Seller Refurbished
Model#: Lam 4428 4420
Location:
|
|
|
Condition : NEW
Location:
United States
|
|
|
Condition : Seller Refurbished
Model#: LAM 690
Location:
|
|
|
|
Condition : NEW
Model#: Lam 590 Drive Belt Kit
Location:
|
|
|
Model#: 775-006659-001
Location:
United States
|
|
|
Model#: 4400
Location:
United States
|
|
|
|
Model#: TCP9400
Location:
United States