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OXFORD INSTRUMENTS PLASMALAB SYSTEM 100 Load Locked RIE Reactive Ion by Bid-Service, LLC
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Product Description
Load Locked RIE Reactive Ion Etching System. System controlled and monitored by PC. Turbo pumped load lock. 8 in. dia. bottom electrode. Shower head style gas delivery. Advanced Energy RFX-600A 13.56 MHz 600W RF generator. Turbo pump on the load lock and one on the process chamber. Includes roughing pump.
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