-
News
-
Subscribe to EP newsletter
New Test & Measurement DealersSelect All
-
- Buy
- Sell
- Industry Directory
- Apps
|
|||
 |
 |
||
PLASMA-THERM SYSTEM VII Tabletop RIE or PECVD Reactive Ion Etcher by Bid-Service, LLC
- Item Condition:
- Brand:
- Model#:
- Location:
- Price:
Product Description
Tabletop RIE or PECVD Reactive Ion Etcher with Turbo Pump option Convertible to PECVD System. PC controller, old PC but sold in good working condition. System can be converted between RIE and PECVD. Electrode holds wafers up to 200mm. Four process gas inputs each with MFC mass flow controllers. Turbo pump and corrosive series vacuum pumps. 500W 13.56 MHz RF Generator with matching network. Gas input via shower head. Last used O2, CHF3, CF4, SF6.
Similar Products
|
|
|
Condition : USED
Model#: BATCHTOP 6 Inch RIE
Location:
United States
|
|
|
Condition : USED
Model#: 770 RIE
Location:
United States
|
|
|
Condition : USED
Model#: Multiplex RIE System
Location:
United States
|
|
|
Condition : USED
Model#: 90 Plus RIE
Location:
United States
|
|
|
|
Condition : USED
Model#: 90 Plus RIE
Location:
United States
|
|
|
Condition : USED
Model#: 790 RIE
Location:
United States
|
|
|
Condition : USED
Model#: PLASMALAB SYSTEM 100
Location:
United States
|
|
|
Condition : USED
Model#: SLR 720 RIE
Location:
United States
|
|
|
Condition : USED
Model#: SLR 720 RIE
Location:
United States
|
|
|
|
Condition : USED
Model#: SLR 720 RIE
Location:
United States
|
|
|
Condition : USED
Model#: Technics RIE 8800
Location:
|
|
|
Condition : USED
Model#: 80 PLUS RIE
Location:
United States
|
|
|
Condition : USED
Model#: RIE 80
Location:
United States
|
|
|
Condition : Seller Refurbished
Model#: Technics RIE 800 Etcher
Location:
|
|
|
Condition : USED
Model#: 790 RIE
Location:
United States
|
|
|
Condition : USED
Model#: Cluster Lock RIE
Location:
United States