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Prometrix RS-55 t/c Resistivity Mapper by SitekProcess
- Item Condition:
- Brand:
- Model#:
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Product Description
Prometrix RS-55 t/c. Tencor RS-55 t/c* 50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp
* Measurement Range
* Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site * <0.2%(1sigma) Measurement Repeatability
* Thermal Chuck Temperature Measurement Accuracy:+/-
0.5'C
* PC based System Controller 25 Mhz 486 Based MPU
* X-Y Map: Up to 1200 Sites Programmable, Probe
* Qualification: 20 sites
* 1-30 Programmable Routines Test Sites (ASTM Standard
Tests Included)
System includes:
* 1 Keyboard # ML4100 SN/C004024
* 1 Mouse-trakb Model # B5XXMP SN/ ISI420007129
* 1 LCD Monitor (NEC Multisync) Model # LCD/1560NX
SN/4YA02054YA
* 1 Computer (AST Research Inc, Bravo LC 4/33) Prometrix
SN/ 940112RS55TC
* 1 Power conditioner (Teal Power Conditioner) Model # 66801
Prometrix SN/ 930155/TC-03
* 1 Wafer Handler Power Supply 115 volts, SN/ 940143C2C
* 1 Printer (HP Desk jet 895 cxi) with one power adapter
C6409-60014
* 1 Omni Map RS55 Resistivity Mapping System SN/
940112RS55TC
* 1 Universal Buffer (Micorbuffer, Practica Peripherals)
Prometrix PN/ 52-0277 Rev B SN/ 33705-0277
* 48W x 30D x 22H SS table (rod top and solid bottom shelf)
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