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Prometrix OmniMap NC-110 by SitekProcess
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Product Description
Tencor OmniMap NC-110* Non-Contact Resistivity System.
* Measures complex aluminum and tungsten multilayer metalization schemes such
as TiN/Al/TiN or W/TiN.
* Realistic process control by measuring actual product wafers
Measurement Performance.
* Measurement Range: 1mW/sq to 1W/sq. Accuracy: +/-1% over
calibrated range. Precision: <0.2% (1s).
* Measurement Speed: 3 seconds per site.
* Throughput (5 site test): 45 wafers per hour.
* Accommodates wafers sizes from 2¿ to 200 mm.
* Polar and XY wafer mapping (>1200 sites). 1-30 site programmable
quick test.
* Diameter scans ( up to 625 sites). 20 site precision test
Analysis Capabilities: Contour, 3-D, and die mapping, with color-coded
warning and specification limits. Trend and SQC charting with color-coded
warning and specification limits.
* Data correlation to automatically convert to thickness, bulk resistivity.
* Data combination to produce average, difference, or ratio maps
Note: This system is comparable to the Prometrix RS55. Tencor purchased
Prometrix and changed the name.
Note 1: A Monitor (not pictured) will be supplied with the tool
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