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Used Technics Micro RIE 800 - PC PC controlled Table top system for by Direct Source Surplus
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Product Description
PC controlled Table top system for parallel plate plasma processing,Advanced Energy 300 W RF power supply with matchbox,(3) Three MFCs process gas control - (2) of which are 100sccm & (1) of which is 25 sccm,9? RIE bottom Electrode SST Chamber and electrodes Water Chiller for Electrode Cooling inert fluid prepared pump and an oil filtration system
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