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SPEC 3510E PC Isotropic Etch System by SPEC Process Equipment Corp.
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Product Description
SPEC Equipment has developed the new GaSonics L3510E PC isotropic etching system. Designed for high etch rates, the 3510 PC provides isotropic profiles along with the ability to etch or ash at low temperatures. The new PC interface utilizes the proven L-Series 3510 process hardware, while replacing the legacy electronics and components. These new modernizations include a newly designed contemporary control system; color Graphic User Interface, real time graphing and saved data recall. With excellent process controls and proven downstream microwave source, the 3510E PC provides a wide range of process capabilities and applications. The system also includes a topside lamp option for heating the substrates in a “pins up” mode. The “pins up” mode allows backside etching of various materials.
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