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GaSonics L3510E Isotropic Etch System by SPEC Process Equipment Corp.
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Product Description
The GaSonics L3510E is a high etch rate, downstream isotropic etching system, designed to provide isotropic profiles along with the ability to etch or ash at low temperatures. Utilizing the proven L-Series 3510 platform, the etch system also uses the downstream microwave sources and applicator. With excellent process controls, the 3510E provides a wide range of process capabilities and applications. The system also includes a topside lamp option for heating the substrates in a “pins up” mode. The “pins up” mode allows backside etching of various materials.
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