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GaSonics AE-2000LL Isotropic Etcher by SPEC Process Equipment Corp.
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Product Description
The GaSonics Aura Loadlock Isotropic Etcher (AE-2000LL) is a microprocessor-controlled down-stream etcher that etches the font, and optionally, the backside of a wafer. The AE-200LL uses a dual-pumping loadlocked system with a heated split-pattern design, wafer transport arms and wafer storage elevators. The AE-2000LL can be used with wafers of 5-8 inch with only minor hardware modifications.
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