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Gasonics Aura 1000 by SitekProcess

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SitekProcess
916-797-9000


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Product Description

Gasonics Aura 1000

*Fully operational Single Wafer Ashing System
*Approx. weight: 350 lbs
*Approx. size: 32" x 37" x 55"
*Wafer size can be 75 - 150mm
*System includes pump
 
***Possible option: CE certification

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