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Gasonics Aura 2000 by SitekProcess
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Product Description
Gasonics Aura 2000*8¿ Cassette to Cassette Single Wafer Etcher
*Configured for 8¿ wafers
*Downstream microwave process
*Loadlock with cool-down station for processed wafer
*Water cooled chamber and lamp assembly
*Downstream endpoint detection
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