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GaSonics L3500 by SPEC Process Equipment Corp.

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SPEC Process Equipment Corp.
(408) 654-9500


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Product Description

The GaSonics/IPC L3500 asher is a versatile system, designed for clean, damage-free removal of the most difficult resist structures. Using the production proven L3300 platform, the L3500 improves throughput and has a wide process window die to its patented large diameter microwave plasma source.

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