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Tencor P-20H Profilometer by SitekProcess
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Product Description
KLA/Tencor P-20H Long Scan Profiler* Long Scan Profiler Measurement of vertical features ranging
from 100A to 0.3mm
* Measurement of vertical features ranging from under 100 to
approximately 0.3 mm, with a vertical resolution of 1 or 25.
* Ability to fit and level data, allowing accurate measurements
on curved surfaces
* Handles wafers from 3" to 8" cassette to cassette
* 2-D and 3-D plots and contour maps Scan up to 25 wafers
without operator intervention Full 8" scanning
* Table top unit
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