Tencor P-12 Surface Profiler. System was originally set up for disks but can easily be converted for wafers. Three dimensional and selected two dimensional data display. Scan length 60 mm. Step height repeatability, 0.001 µm max. in the 13 µm range, 0.005 µm max. in the 300 µm range.System has been refurbished and is in excellent condition. Available for immediate shipment.