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Anatech Hummer X Sputtering System by SitekProcess
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Product Description
Anatech / Technics Hummer X Sputtering System* 6" Inner diameter Glass bell jar
* Single target (not supplied) * Does not come with gold target.
* Can be configured for single wafer or standard SEM samples
* Power supply included
* Pump included (inside system)
* Cold Deposition/Etch Sputter Coater for SEM Sample Preparation.
* Does not have thickness monitoring crystal.
* Magnetically enhanced sputter head minimizes sample heating.
* Etch and plasma mode for removal of organic surface contamination.
* Automatic slow venting at termination of process.
* Sample stage accommodates up to 3 in. dia. substrate or 12 SEM stubs.
* 115V, 60 Hz, 4A.
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