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PLASMA SCIENCES INC. RIE-200W Small Tabletop Reactive Ion Etcher RIE. by Bid-Service, LLC
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Product Description
Small Tabletop Reactive Ion Etcher RIE. Offers a complete anisotropic etch in a compact bench-top format. 7-1/2 in. chamber ID with 6 in. substrate surface. Roughing pump only, no turbo pump. Two gas inputs with needle valves. RF power 200W at 13.56 MHz.
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