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Matrix 104 Asher by SitekProcess
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Product Description
Matrix 105 AsherThe Matrix System One Model 104 Asher is a single chamber, automatic microprocessor-controlled photoresist stripper, setup for 4" - 6" wafers.
*Model 105
*Configured for up to 6" wafers
*Single wafer, single cassette
*Independent control of pressure, RF power, temperature, gas flow, & substrate position
*Multi-step program (three steps + over etch) process program
*"Butterfly" Valve for more precise pressure control.
*Phase magnitude detector to provide real-time RF impedance matching control.
*Two Mass Flow Controllers
*Vacuum Hose Assembly
*Range for Strip:
*Range for Descum:
*Wafer Lift Pin Assembly (up and down)
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