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Matrix 403 Etcher by SitekProcess
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Product Description
Matrix 403 Etcher* EQP-00566
* Down Stream isotropic etcher for oxide, poly or nitride films. * Great for the "Bowl Etch"
* Capable of 4" to 6" wafers
* Cassette loading
* ENI OEM 6 13.56 MHz RF Generator
* Temperature controlled chuck
* Throught the wall model
* S/N 7116 101-0775
* 200-240 Volts 50/60Hz 1 Phase
* Wafer count 228040
* Systme time 946413
* Brooks Automation handler
Model # 6100-36
S/N F-1845
* ENI Generator
Model # OEM-6M-11781
S/N 4897
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